公开(公告)号：GB2547122A

公开(公告)日：2017-08-09

申请号：GB201704242

申请日：2016-02-08

Applicant: IBM

Inventor： JOY CHENG ,  ANINDARUPA CHUNDER ,  ANKIT VORA ,  MELIA TJIO ,  DANIEL PAUL SANDERS

IPC: C08L25/08 ,  B82Y30/00 ,  C08F12/20 ,  C08F12/24 ,  C08F212/08 ,  C08F220/22 ,  C08F220/24 ,  C08G64/18 ,  C08L27/00 ,  C08L53/00 ,  C08L69/00 ,  C09D125/18 ,  C09D169/00 ,  H01L21/027

Abstract: A film layer comprising a high-chi (ϰ) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.

公开(公告)号：GB2547122B

公开(公告)日：2019-09-18

申请号：GB201704242

申请日：2016-02-08

Applicant: IBM

Inventor： JOY CHENG ,  ANINDARUPA CHUNDER ,  ANKIT VORA ,  MELIA TJIO ,  DANIEL PAUL SANDERS

IPC: C08L25/08 ,  B82Y30/00 ,  C08F12/20 ,  C08F12/24 ,  C08F212/08 ,  C08F220/22 ,  C08F220/24 ,  C08G64/18 ,  C08L27/00 ,  C08L53/00 ,  C08L69/00 ,  C09D125/18 ,  C09D169/00 ,  H01L21/027

Abstract: A film layer comprising a high-chi (χ) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0 Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.