-
公开(公告)号:JPH06216472A
公开(公告)日:1994-08-05
申请号:JP29305293
申请日:1993-11-24
Applicant: IBM
Inventor: ATSUBASU BIFUAARATSUDO , MAAKU EDOUIN JIYOSUTO , KURISUTOFU ESU HAADAA
Abstract: PURPOSE: To provide a semiconductor ridge waveguide laser structure with a ridge-roughened in a sidewall. CONSTITUTION: This structure includes a substrate and an activate layer 12 disposed between an upper clad layer 14 and a lower clad layer 16, and further contains a waveguide ridge 18 consisting of a contact layer 20 of the upper clad layer and a trapezoid ridge part 16. A sidewall 24 of the trapezoid ridge part is roughened to reduce a contact resistance value.