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公开(公告)号：DE1946673A1
公开(公告)日：1970-08-06
申请号：DE1946673
申请日：1969-09-15
Applicant: IBM
Inventor： LEFF JERRY , AUGUST ROBERTS ARTHUR
IPC: H01L21/00 , H01L21/285 , H01L23/485 , B44D1/18
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