公开(公告)号：US3699304A

公开(公告)日：1972-10-17

申请号：US3699304D

申请日：1969-12-15

Applicant: IBM

Inventor： BALDWIN EDWIN C JR ,  WRENNER WARREN R

IPC: G01Q70/00 ,  H01J37/304 ,  B23K15/00

CPC classification number: H01J37/3045

Abstract: Method and apparatus for controlling the deflection of an energy beam to impinge a workpiece with improved accuracy. A computer and interface unit direct the movement of the beam over a master target to learn and record addresses of impingement areas corresponding to those on a workpiece. Differential current flow in two conductive elements is used to determine accurate location of the address. Upon the substitution of a workpiece for the master target, impingement addresses can be selected without additional corrective deflection circuits.

Abstract translation: 用于控制能量束的偏转以改善精度冲击工件的方法和装置。 计算机和接口单元将光束的移动引导到主目标上以学习和记录与工件上相对应的冲击区域的地址。 使用两个导电元件中的差分电流来确定地址的准确位置。 在替代主目标的工件时，可以选择冲击地址而不需要额外的校正偏转电路。