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公开(公告)号：DE59209764D1
公开(公告)日：1999-12-09
申请号：DE59209764
申请日：1992-05-20
Applicant: IBM
Inventor： BARTHA JOHANN , GRESCHNER JOHANN , PROBST KARL-HEINZ , SCHMID GERHARD
IPC: H01L21/302 , G03F7/00 , H01L21/28 , H01L21/3065 , H01L21/3213 , H01L21/033
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