公开(公告)号：DE69126439D1

公开(公告)日：1997-07-10

申请号：DE69126439

申请日：1991-01-23

Applicant: IBM

Inventor： BAUM THOMAS ,  LARSON CARL ,  REYNOLDS SCOTT

IPC: C07F1/08 ,  C07F1/10 ,  C07F9/02 ,  C07F9/50 ,  C07F15/00 ,  C23C16/18 ,  C23C16/48 ,  C23C16/50 ,  H01L21/285 ,  H05K3/40

Abstract: Chemical vapor deposition precursors for depositing copper, silver, rhodium and iridium metals on substrates comprise ligand stabilized +1 metal beta-diketonate coordination complexes of said metals. Uses of such precursors in CVD processes are also provided.

公开(公告)号：DE69013693T2

公开(公告)日：1995-05-04

申请号：DE69013693

申请日：1990-10-15

Applicant: IBM

Inventor： BAUM THOMAS ,  BROCK PHILLIP ,  DAWSON DANIEL

IPC: C07F1/12 ,  C07F1/00

Abstract: Dialkyl gold(III) beta -diketonates are synthesized in a two-step, one-pot process using a gold trihalide, an alkyl lithium compound and a beta -diketone.

公开(公告)号：DE69013693D1

公开(公告)日：1994-12-01

申请号：DE69013693

申请日：1990-10-15

Applicant: IBM

Inventor： BAUM THOMAS ,  BROCK PHILLIP ,  DAWSON DANIEL

IPC: C07F1/12 ,  C07F1/00

Abstract: Dialkyl gold(III) beta -diketonates are synthesized in a two-step, one-pot process using a gold trihalide, an alkyl lithium compound and a beta -diketone.