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公开(公告)号：DE3172457D1
公开(公告)日：1985-10-31
申请号：DE3172457
申请日：1981-12-02
Applicant: IBM
Inventor： BEHA HANSJORG DR , JACKEL HEINZ , VETTIGER PETER
IPC: G11C11/44 , G03F7/20 , H01L21/027 , H01L39/22
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