公开(公告)号：EP0886758A1

公开(公告)日：1998-12-30

申请号：EP96903192

申请日：1996-03-13

Applicant: IBM

Inventor： BINNIG GERD KARL ,  BRUGGER JUERGEN ,  HAEBERLE WALTER ,  ROHRER HEINRICH ,  VETTIGER PETER

IPC: G01B21/30 ,  G01B5/28 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/32 ,  G01Q70/10 ,  G11B9/00 ,  G11B9/14 ,  G12B1/00

CPC classification number: G01Q70/10 ,  Y10S977/873

Abstract: The present invention concerns a cantilever arrangement for scanning a surface (16). This arrangement comprises a first cantilever (11) having a first probe (14) and a second cantilever (13) having a second probe (15). Both cantilevers (11, 13) are mechanically coupled such that the second cantilever (13) follows the movement of the first cantilever (11), i.e. the deflection of the first cantilever (11) defines the deflection of the second cantilever (13).

公开(公告)号：WO2004043850A3

公开(公告)日：2005-03-24

申请号：PCT/GB0304829

申请日：2003-11-07

Applicant: IBM ,  IBM UK

Inventor： POGGE BERNHARD ,  DESPONT MICHEL ,  DRECHSLER UTE ,  PRASAD CHANDRIKA ,  VETTIGER PETER ,  YU ROY

IPC: B81C3/00 ,  H01L21/768

CPC classification number: B81C1/00238 ,  B81B2203/0307 ,  H01L21/76898 ,  H01L2224/16225

Abstract: A vertically integrated structure includes a micro-electromechanical system (MEMS) and a chip for delivering signals to the MEMS. The MEMS has an anchor portion having a conductor therethrough, by which it is connected to a substrate. The chip is attached to the MEMS substrate in a direction normal to the substrate surface, so as to make a conductive path from the chip to the MEMS. The chip may be attached by bonding the conductor to C4 metal pads formed on the chip, or by bonding the conductor to metal studs on the chip. The MEMS substrate may be thinned before attachment to the chip, or may be removed from the underside of the MEMS. A temporary carrier plate is used to facilitate handling of the MEMS and alignment to the chip.

Abstract translation: 垂直整合的结构包括微机电系统（MEMS）和用于向MEMS输送信号的芯片。 MEMS具有一个具有穿过其中的导体的锚定部分，通过该锚固部分连接到基底。 该芯片沿着垂直于衬底表面的方向附接到MEMS衬底，从而形成从芯片到MEMS的导电路径。 可以通过将导体接合到形成在芯片上的C4金属焊盘，或者通过将导体粘合到芯片上的金属螺柱来附接芯片。 MEMS基板可以在连接到芯片之前变薄，或者可以从MEMS的下侧移除。 使用临时载体板来促进MEMS的处理和与芯片的对准。

公开(公告)号：JP2002109845A

公开(公告)日：2002-04-12

申请号：JP2001227020

申请日：2001-07-27

Applicant: IBM

Inventor： VETTIGER PETER ,  WARUTAA HEEBERURE ,  BINNIG GERD

IPC: G11B21/16 ,  G11B5/60 ,  G11B21/21

Abstract: PROBLEM TO BE SOLVED: To provide a very sensitive sensor system which measures a gap between a disk and a head at relatively high speed. SOLUTION: The head suspension maintaing the gap between a reading and writing head and a data storage disk, is provided with a heater which heats up gas in the gap and sensors 90 to 140 which generate outputs indicating the thickness of the gap. The sensor 90 generates an output in accordance with heat conduction crossing the gap.

公开(公告)号：JPS6320837A

公开(公告)日：1988-01-28

申请号：JP13200587

申请日：1987-05-29

Applicant: IBM

Inventor： GRAF VOLKER ,  MOHR THEODOR OSKAR ,  BUCHMANN PETER LEO ,  VETTIGER PETER ,  HOH PETER DAVID

IPC: H01L21/033 ,  H01L21/285 ,  H01L21/311 ,  H01L21/318 ,  H01L21/336 ,  H01L21/338 ,  H01L29/812

公开(公告)号：JP2003346392A

公开(公告)日：2003-12-05

申请号：JP2003139845

申请日：2003-05-19

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーション

Inventor： ALBRECHT THOMAS ,  BINNIG GERD ,  ELEFTHERIOU EVANGELOS ,  POZIDIS CHARALAMPOS ,  SRI-JAYANTHA SRI M ,  VETTIGER PETER

IPC: G11B9/14 ,  G11B9/00 ,  G11B27/10

CPC classification number: G11B27/102 ,  B82Y10/00 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1454 ,  G11B9/1472 ,  G11B2005/0021

Abstract: PROBLEM TO BE SOLVED: To provide a storage medium and a method for scanning a storage medium. SOLUTION: The storage medium (1) for storing data in the form of marks (5) is scanned by an array of probes (2) for mark detecting purposes in a scanning mode. The storage medium (1) has fields (4) with each field (41, 42) to be scanned by an associated one of the probes (21). At least one of the fields (42) has marks representing operational data for operating the scanning mode. Scanning parameter are computed from the operational data and the scanning mode is adjusted according to the computed parameters. COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：提供一种用于扫描存储介质的存储介质和方法。 解决方案：用于以标记（5）的形式存储数据的存储介质（1）由用于扫描模式的标记检测目的的探针（2）阵列扫描。 存储介质（1）具有场（4），每个场（41,42）被相关联的一个探针（21）扫描。 至少一个字段（42）具有表示用于操作扫描模式的操作数据的标记。 根据运算数据计算扫描参数，根据计算参数调整扫描模式。 版权所有（C）2004，JPO

公开(公告)号：JP2000152596A

公开(公告)日：2000-05-30

申请号：JP30709599

申请日：1999-10-28

Applicant: IBM

Inventor： HAEBERLE WALTER ,  LUTWYCHE MARK I ,  VETTIGER PETER

IPC: G05D3/00 ,  H02K41/03 ,  H02K41/035 ,  H02N11/00

Abstract: PROBLEM TO BE SOLVED: To provide a magnetic scanning/positioning system which has at least two items of degree of freedom. SOLUTION: A magnetic scanning/positioning system includes a support base 6 to which magnets 7.1 and 7.2 are attached, a movable platform 1 to which at least two electric coils 2 are attached and suspension elements 4 with which the movable platform is elastically connected to the support base. The electric coils 2 are arranged on the movable platform horizontally to provide an essentially flat construction with the movable platform. As the flat construction is combined with the flat support base, a magnetic scanning/positioning system which is characterized in a latently small size, light weight and flat structure, fast response, low power consumption and a relatively large movement range, for instance maximum 10 mm, can be provided. The magnetic scanning/ positioning system with at least two items of degree of freedom can be used in the fields of a scanning probe microscope, data memory and imaging.

公开(公告)号：WO03021592A8

公开(公告)日：2003-06-05

申请号：PCT/IB0202828

申请日：2002-07-19

Applicant: IBM ,  BAECHTOLD PETER ,  BINNIG GERD K ,  CHERUBINI GIOVANNI ,  DHOLAKIA AJAY ,  DUERIG URS T ,  ELEFTHERIOU EVANGELOS S ,  LOELIGER THEODOR W ,  VETTIGER PETER

Inventor： BAECHTOLD PETER ,  BINNIG GERD K ,  CHERUBINI GIOVANNI ,  DHOLAKIA AJAY ,  DUERIG URS T ,  ELEFTHERIOU EVANGELOS S ,  LOELIGER THEODOR W ,  VETTIGER PETER

IPC: G11B9/00 ,  G11B9/14 ,  G11B20/10 ,  G11B20/18

CPC classification number: B82Y10/00 ,  G11B9/04 ,  G11B9/14 ,  G11B20/18 ,  G11B2005/0021

Abstract: Apparatus for detecting data in a sensor signal generated by a read sensor in a local probe data storage device comprises a differentiation for subtracting a value of the sensor signal from the succeeding value of the sensor signal to generate a ternary difference signal ; and a convertor connected to the differentiator for converting the difference signal into a binary output signal indicative of the detected data. A local probe data storage device comprising such apparatus is also described.

Abstract translation: 用于检测由本地探针数据存储装置中的读取传感器生成的传感器信号中的数据的设备包括：差分，用于从传感器信号的后继值中减去传感器信号的值以生成三态差分信号; 以及连接到差分器的转换器，用于将差分信号转换为表示检测数据的二进制输出信号。 还描述了包括这种设备的本地探测器数据存储设备。

公开(公告)号：JP2001273601A

公开(公告)日：2001-10-05

申请号：JP2001055705

申请日：2001-02-28

Applicant: IBM

Inventor： ALLENSPACH ROLF ,  BINNIG GERD K ,  HAEBERLE WALTER ,  VETTIGER PETER

IPC: G11B11/10 ,  G11B5/00 ,  G11B5/012 ,  G11B5/02 ,  G11B5/255 ,  G11B5/48 ,  G11B5/74 ,  G11B5/82 ,  G11B9/00 ,  G11B13/04

Abstract: PROBLEM TO BE SOLVED: To provide a storage system which enables memory density of several hundred Gb/inch2 without receiving mechanical wear. SOLUTION: The method of using a magnetizable memory medium (10), exposing the memory medium to an artificial external magnetic field H coupled externally to the memory medium, simultaneously applying heat extremely locally thereto at magnitude of a bit size in bit writing and making the external magnetic field locally greater than the holding magnetic field (dependent upon temperature) in locations (32) where the heat is applied is proposed. Further, two-dimensional arrays of cantilever chips (24) are advantageously used in this storage system. The respective chips act as heat sources when activated by current. The current flows in the resistance passages in the chips (24) and generates the necessary temperature in the small memory medium locations (32) where the writing of the bit is planned. This temperature is made closer to the Curie temperature or compensation temperature of the magnetic material.

公开(公告)号：JPS62232127A

公开(公告)日：1987-10-12

申请号：JP3596487

申请日：1987-02-20

Applicant: IBM

Inventor： BUCHMANN PETER LEO ,  VETTIGER PETER ,  ZEGHBROECK BART JOZEF VAN

IPC: H01L21/30 ,  G03F7/40 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065

公开(公告)号：WO02077988A3

公开(公告)日：2003-02-20

申请号：PCT/IB0200816

申请日：2002-03-15

Applicant: IBM ,  BINNIG GERD K ,  HAEBERLE WALTER ,  VETTIGER PETER

Inventor： BINNIG GERD K ,  HAEBERLE WALTER ,  VETTIGER PETER

IPC: G11B9/14 ,  G11B9/00 ,  G11B11/00 ,  G11B11/16 ,  G11B13/00

CPC classification number: B82Y10/00 ,  G11B9/14 ,  G11B11/007 ,  G11B13/00

Abstract: A method for writing data to and/or reading data from locations on a surface (90) via a tip (40) comprises moving the tip between the locations on the surface. At each location, energy (250) is selectively applied to the surface via the tip and the tip and the surface are selectively forced together in synchronization with the application of energy.

Abstract translation: 一种通过尖端（40）将数据写入和/或从表面（90）上的位置读取数据的方法包括在表面上的位置之间移动尖端。 在每个位置，能量（250）经由尖端被选择性地施加到表面，并且尖端和表面与能量的施加同步地选择性地被强制在一起。