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公开(公告)号：US3561108A
公开(公告)日：1971-02-09
申请号：US3561108D
申请日：1967-08-02
Applicant: IBM
Inventor： BENJAMIN CHARLES E
IPC: H01L23/485 , H01L27/02 , H01L7/64
CPC classification number: H01L27/0207 , H01L23/485 , H01L2924/0002 , Y10T29/49126 , Y10T29/49787 , H01L2924/00
Abstract: A PROCESS OF FABRICATING SEMICONDUCTOR DEVICES IN WHICH A MASTER SLICE HAVING A STANDARD DEVICE CONFIGURATION IS UTILIZED FOR OBTAINING A VARIETY OF FINISHED DEVICE FORMS, IN WHICH THE DIMENSION FOR THE FRAMES OF THE MASTER SLICE IS DESIGNATED A, AND AN ARRAY OF DEVICE FORMS HAVING A DIMENSION OF A(N+1/2) IS TO BE FABRICATED, WHICH INCLUDES THE ESSENTIAL STEP OF FABRICATING THE DEVICE FORMS SO THAT THERE IS 180* ROTATIONAL SYMMETRY ABOUT A CENTER POINT FOR SUCCESSIVE ROWS OF DEVICE FORMS IN SAID ARRAY.
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公开(公告)号：CA829541A
公开(公告)日：1969-12-09
申请号：CA829541D
Applicant: IBM
Inventor： BARDELL PAUL H JR , BENJAMIN CHARLES E , BARSON FRED , PECORARO RAYMOND P
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