公开(公告)号：DE1521342A1

公开(公告)日：1969-07-24

申请号：DE1521342

申请日：1966-12-22

Applicant: IBM

Inventor： BERGER SCOW KENNETH ,  PAUL ANDERSON JOSEPH ,  IRVING BERTELSEN BRUCE

IPC: H01F41/22 ,  C23C13/02

Abstract: 1,163,010. Magnetic structures. INTERNATIONAL BUSINESS MACHINES CORP. 23 Dec., 1966 [30 Dec., 1965], No. 57615/66. Heading H1H. [Also in Division C7] A thin magnetic film is deposited on a substrate, e.g. by vacuum evaporation, at above 300‹ C. in a non-oxidizing atmosphere in the presence of a magnetic field, and then exposed to an O 2 -containing atmosphere whilst maintaining the temperature above 300‹ C. The film may be of a Ni-Fe alloy containing 77-83% Ni and optionally 3% Co, and may be 900 A thick. The substrate may be glass or metal, e.g. Ag-Cu, and is first cleaned, baked in vacuo, and coated with SiO by vacuum evaporation. The magnetic film may be deposited at 305- 425‹ C. at a pressure of 1À5 x 10- 6 Torr in a magnetic field of 30 Oe. The O 2 atmosphere is created by leaking in dry air to a pressure of 2 to 8x 10-5 Torr, with the same temperature and magnetic field. The surface is said to be oxidized.