公开(公告)号：AU8001301A

公开(公告)日：2002-03-26

申请号：AU8001301

申请日：2001-08-29

Applicant: IBM

Inventor： BINNING GERD K ,  BONA GIAN-LUCA ,  HABERLE WALTER ,  VETTIGER PETER

IPC: G02B6/35 ,  G02B26/00

Abstract: An optical device comprises a substrate having a plane surface. An optical path is disposed on the substrate and extends in a plane parallel to the surface of the substrate. A recess intercepts the optical path. An optical element is provided for modifying light incident thereon. The optical element is moveable within the recess between a first position in which the optical element is located in the path and a second position in which optical element is remote from the path. A cantilever suspends the optical element for movement within the recess between the second and first positions in a direction normal to the surface of the substrate.