-
公开(公告)号：GB2518087A
公开(公告)日：2015-03-11
申请号：GB201422125
申请日：2013-05-17
Applicant: IBM
Inventor： BLACKSHEAR EDMUND D , LOMBARDI THOMAS , MERTE DONALD , OSTRANDER STEVEN P , WEISS THOMAS , ZHENG JIANTAO
IPC: H01L21/687
Abstract: A fixture (86) for shaping a laminate substrate (10) includes a trap ring (60), a base plate (40) and a center button (70). The base plate (40) includes a recess (42) adapted to receive the laminate substrate (10). The center button (70) is disposed in an opening (45) in the base plate (40). The center button (70) may be adjusted to shape the laminate substrate (10).
Search Results
1
records
(took 0.018 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
