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公开(公告)号：DE3269891D1
公开(公告)日：1986-04-17
申请号：DE3269891
申请日：1982-11-23
Applicant: IBM
Inventor： BLAIR WILLIAM WOLF , DORAN SAMUEL KAY , LANGNER GUENTHER OTTO
IPC: H01J37/21 , G02B7/28 , H01J37/22 , H01J37/304 , H01J37/305 , H01L21/027 , G03B41/00 , G02B7/11
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