Patent search ap:("IBM") AND inv:"BRODSKY COLIN" Page 1

1.

发明公开
SUBSTRATE PLANARIZATION WITH IMPRINT MATERIALS AND PROCESSES 审中-公开
Title translation: 带打印材料与方法底平面化

公开(公告)号：EP2376982A4

公开(公告)日：2012-07-11

申请号：EP10729417

申请日：2010-01-05

Applicant: IBM

Inventor： BURNS SEAN , BRODSKY COLIN , BURNS RYAN

IPC: G03F7/00 , G03F7/027 , G03F7/09 , G03F7/16 , H01L21/02

CPC classification number: G03F7/027 , G03F7/094 , G03F7/168

Patent Agency Ranking