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公开(公告)号:JPS57157572A
公开(公告)日:1982-09-29
申请号:JP1651582
申请日:1982-02-05
Applicant: IBM
Inventor: BUEN WAI DOU , POORU JIEI TSUANGU
IPC: H01L21/8234 , H01L21/033 , H01L21/336 , H01L27/088 , H01L29/423 , H01L29/78
公开(公告)号:JPS57157572A
公开(公告)日:1982-09-29
申请号:JP1651582
申请日:1982-02-05
Applicant: IBM
Inventor: BUEN WAI DOU , POORU JIEI TSUANGU
IPC: H01L21/8234 , H01L21/033 , H01L21/336 , H01L27/088 , H01L29/423 , H01L29/78