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公开(公告)号：DE3481086D1
公开(公告)日：1990-02-22
申请号：DE3481086
申请日：1984-11-09
Applicant: IBM
Inventor： CASTELLANO JR , DISTEFANO THOMAS HERMAN , OLYHA JR
IPC: G01N21/88 , G01N21/956 , G01N27/00 , G01R31/265 , G01R31/308 , H01L21/66 , G01R31/26
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