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公开(公告)号：DE3570556D1
公开(公告)日：1989-06-29
申请号：DE3570556
申请日：1985-07-12
Applicant: IBM
Inventor： CODELLA CHRISTOPHER FRANK , OGURA SEIKI
IPC: H01L21/265 , H01L21/338 , H01L29/08 , H01L29/10 , H01L29/812 , H01L29/80
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