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公开(公告)号:SG91930A1
公开(公告)日:2002-10-15
申请号:SG200103424
申请日:2001-06-09
Applicant: IBM
Inventor: ERIC JAMES LEE , FRANCISCO A MARTIN , CONG WEI
IPC: H01L21/304
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公开(公告)号:SG91930A1
公开(公告)日:2002-10-15
申请号:SG200103424
申请日:2001-06-09
Applicant: IBM
Inventor: ERIC JAMES LEE , FRANCISCO A MARTIN , CONG WEI
IPC: H01L21/304