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1.发明专利
公开(公告)号：MY124028A
公开(公告)日：2006-06-30
申请号：MYPI20003025
申请日：2000-07-03
Applicant: IBM
Inventor： LEPING LI , XINHUI WANG
IPC: B24B49/00 , H01L21/302 , B24B37/013 , B24B49/16 , H01L21/304
Abstract: A METHOD IS PROVIDED FOR DETECTING THE ENDPOINT OF A FILM REMOVAL PROCESS SUCH AS CHEMICAL-MECHANICAL POLISHING (CMP). THE PROCESS USES A DEVICE (10) HAVING A SHAFT (15), AND FRICTION IN THE FILM REMOVAL CAUSES TORQUE ON THE SHAFT. TWO AXIALLY DISPLACED REFLECTING PORTIONS (41, 42) ARE PROVIDED ON THE SHAFT. LIGHT (430, 440) REFLECTED FROM THESE PORTIONS GENERATES FIRST AND SECOND REFLECTED SIGNALS (71, 72), RESPECTIVELY. A PHASE DIFFERENCE BETWEEN THE REFLECTED SIGNALS IS DETECTED, AND AN OUTPUT SIGNAL (711) IS GENERATED IN ACCORDANCE THEREWITH. A CHANGE IN THE OUTPUT SIGNAL INDICATES A CHANGE IN DEFPRMATION OF THE SHAFT RESULTING FROM CHANGE IN THE TORQUE, THEREBY INDICATING THE ENDPOINT OF THE FILM REMOVAL PROCESS.(FIG 4)
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3.发明专利
公开(公告)号：SG90146A1
公开(公告)日：2002-07-23
申请号：SG200003553
申请日：2000-06-26
Applicant: IBM
Inventor： LEPING LI , XINHUI WANG
IPC: H01L21/302 , B24B37/013 , B24B49/16 , H01L21/304 , B24B49/00 , H01 , G01B5/00
Abstract: A method is provided for detecting the endpoint of a film removal process such as chemical-mechanical polishing (CMP). The process uses a device having a shaft, and friction in the film removal causes torque on the shaft. Two axially displaced reflecting portions are provided on the shaft. Light reflected from these portions generates first and second reflected signals, respectively. A phase difference between the reflected signals is detected, and an output signal is generated in accordance therewith. A change in the output signal indicates a change in deformation of the shaft resulting from change in the torque, thereby indicating the endpoint of the film removal process.
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