公开(公告)号：IT8022607D0

公开(公告)日：1980-06-06

申请号：IT2260780

申请日：1980-06-06

Applicant: IBM

Inventor： DREYFUS RUSSELL WARREN ,  PENEBRE NICHOLAS ANGELO ,  CORKLE RICHARD ANTHONY MC

IPC: B23K28/00 ,  C08J7/00 ,  H01J3/04 ,  H01J27/02 ,  H01J27/20 ,  H01J37/08 ,  H01J49/14 ,  H01L21/265 ,  H01V

Abstract: The present invention describes an ion gun which is capable of producing relatively high density ion currents. The ion gun employs at least one capillary duct the surface of which is semiconducting and has secondary electron emission coefficient greater than one to generate ions from a source of an ionizable material and to accelerate the ions so generated.