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公开(公告)号：DE69010271D1
公开(公告)日：1994-08-04
申请号：DE69010271
申请日：1990-04-27
Applicant: IBM
Inventor： BINDRA PERMINDER , COVERT KATHLEEN LORRAINE , LIGHT DAVID NOEL
IPC: C23F1/46
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公开(公告)号：DE69010271T2
公开(公告)日：1995-02-02
申请号：DE69010271
申请日：1990-04-27
Applicant: IBM
Inventor： BINDRA PERMINDER , COVERT KATHLEEN LORRAINE , LIGHT DAVID NOEL
IPC: C23F1/46
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