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发明专利
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公开(公告)号：JPS63116379A

公开(公告)日：1988-05-20

申请号：JP16994887

申请日：1987-07-09

Applicant: IBM

Inventor： BIRENDORA NASU AGARUWARA , POORU HARII PAAMATEIA , DAAYUAN SHII

IPC: H01L21/48 , H01L23/498 , H01L23/50 , H01R12/04 , H01R12/55 , H05K1/18 , H05K3/34

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