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公开(公告)号：DE2459183A1
公开(公告)日：1975-09-04
申请号：DE2459183
申请日：1974-12-14
Applicant: IBM
Inventor： DAETWILER KURT , GASSER MARCEL
IPC: H05K3/00 , G03F1/00 , G03F1/08 , G03F7/095 , G03F7/20 , H01L21/266 , H01L21/28 , H01L21/3205 , H05K3/06 , H01L21/31
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