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公开(公告)号:GB2602607B
公开(公告)日:2023-05-17
申请号:GB202205126
申请日:2020-08-19
Applicant: IBM
Inventor: PAUL ANDRY , ERIC PETER LEWANDOWSKI , DANA ALEXA TOTIR
IPC: H01M10/0525 , H01M6/40 , H01M10/058
Abstract: A method of forming a thin film battery may include forming may include forming a trench in a substrate, depositing a stencil on top surface of the substrate, wherein the stencil is aligned with the trench, depositing a cathode layer in the trench, wherein the cathode layer is in direct contact with the stencil, and compressing the cathode layer into the trench to reduce a thickness of the cathode layer. The compressing the cathode layer into the trench may include applying isostatic pressure onto the cathode layer using a pressure head. The method may also include depositing an electrolyte layer on top of the cathode layer, depositing an anode layer on top of the electrolyte layer, and depositing an anode collector layer on top of the anode layer.
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公开(公告)号:GB2602607A
公开(公告)日:2022-07-06
申请号:GB202205126
申请日:2020-08-19
Applicant: IBM
Inventor: PAUL ANDRY , ERIC PETER LEWANDOWSKI , DANA ALEXA TOTIR
IPC: H01M10/0525 , H01M10/058
Abstract: A method of forming a thin film battery may include forming may include forming a trench in a substrate, depositing a stencil on top surface of the substrate, wherein the stencil is aligned with the trench, depositing a cathode layer in the trench, wherein the cathode layer is in direct contact with the stencil, and compressing the cathode layer into the trench to reduce a thickness of the cathode layer. The compressing the cathode layer into the trench may include applying isostatic pressure onto the cathode layer using a pressure head. The method may also include depositing an electrolyte layer on top of the cathode layer, depositing an anode layer on top of the electrolyte layer, and depositing an anode collector layer on top of the anode layer.
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