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公开(公告)号:DE3379618D1
公开(公告)日:1989-05-18
申请号:DE3379618
申请日:1983-01-21
Applicant: IBM
Inventor: DASH SOMANATH , GARNACHE RICHARD RAYMOND , TROUTMAN RONALD ROY
IPC: H01L29/80 , H01L21/8238 , H01L27/08 , H01L27/092 , H01L27/12 , H01L29/49 , H01L29/78 , H01L29/786 , H01L21/82