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公开(公告)号：DE3170974D1
公开(公告)日：1985-07-25
申请号：DE3170974
申请日：1981-02-16
Applicant: IBM
Inventor： DATWYLER KURT , OOSENBRUG ALBERTUS
IPC: C23F4/00 , C23C8/36 , C23C16/50 , C23F1/00 , C23F1/02 , G03F1/54 , G03F1/80 , G03F7/40 , H01L21/302 , H01L21/3065 , C23C8/04 , H01L21/306 , H01L21/465
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