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公开(公告)号：JPS61265853A
公开(公告)日：1986-11-25
申请号：JP4427786
申请日：1986-03-03
Applicant: IBM
Inventor： ABUINATSUSHIYU SURIPATSUDO ADO , JIYOSEFU MASHIYUU HAABUIRUCHIY , JIYOSEFU ROKO RANARI , DEEBITSUDO UIRIAMU RITSUCHI
IPC: H01L21/3205 , B23K20/233 , B23K35/00 , C04B41/52 , C04B41/89 , H01L21/48 , H01L21/60 , H01R43/16 , H05K3/24
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