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公开(公告)号:JPS61265853A
公开(公告)日:1986-11-25
申请号:JP4427786
申请日:1986-03-03
Applicant: IBM
Inventor: ABUINATSUSHIYU SURIPATSUDO ADO , JIYOSEFU MASHIYUU HAABUIRUCHIY , JIYOSEFU ROKO RANARI , DEEBITSUDO UIRIAMU RITSUCHI
IPC: H01L21/3205 , B23K20/233 , B23K35/00 , C04B41/52 , C04B41/89 , H01L21/48 , H01L21/60 , H01R43/16 , H05K3/24
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公开(公告)号:JPH03200333A
公开(公告)日:1991-09-02
申请号:JP6134290
申请日:1990-03-14
Applicant: IBM
Inventor: KIISU FUOURAA BETSUKUHAN , DEBUITSUDO KARORU CHIYARENAA , ARUNABA GUPUTA , JIYOSEFU MASHIYUU HAABUIRUCHIY , JIEEMUSU MAAKU RIAZU , JIEEMUSU ROBAATO ROIDO , DEBUITSUDO KURIFUOODO RONGU , HORATEIO KUINONESU , KURISHIYUNA SESUHAN , MORISU SHIYATSUZUKESU
IPC: B23K26/00 , H01L21/3205 , H01L21/82 , H01L23/52 , H01L23/525 , H05K3/22
Abstract: PURPOSE: To form an open circuit suitable for use in the line of a semiconductor chip by feeding a DC current to a conductor and heating a selected position to be open-circuited of the conductor. CONSTITUTION: A power supply 34 operates to feed a DC current I through probes 36, 38 and a conductor 28'. When the current I is flowing through the conductor 28', a laser 22 and a focusing mechanism 24 operate to focus laser energy 26 generally onto a region 46 thus elevating the temperature of a conductor thereat. A sensor 40 operates to monitor the resistance in the conductor 28'. Since a DC current I is employed along with local heating of the conductor 28' with laser energy 26, an open circuit is formed surely in the conductor in a relatively short time without substantially damaging the peripheral and underlying structure.
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公开(公告)号:JPH0220049A
公开(公告)日:1990-01-23
申请号:JP12303489
申请日:1989-05-18
Applicant: IBM
IPC: H01L23/473 , H01L23/36 , H01L23/40 , H01L23/433
Abstract: PURPOSE: To dissipate heat efficiently from a heat generating device without contacting a cooling fluid directly to a chip or a region fixed with the chip by providing a thermally conductive cooling hat for providing a space from a tinned inner heat conduction unit, and a bias means for pressing the inner heat conduction unit against an electronic circuit device. CONSTITUTION: The cooling module for an electronic circuit device comprises a finned inner heat conduction unit 14, a corresponding tinned cooling hat 40, and heat medium 29 exhibiting deformability at the boundary of the inner heat conduction unit and the boundary of corresponding fin of the cooling hat. A unique bias means 20 imparts a balanced force between the inner heat conduction unit 14 and the cooling hat 40 and presses the surface at the flat base 15 of the inner heat conduction unit against a corresponding chip 11 through the heat medium 29. The bias means 20 imparts a balanced load to the boundary of the chip 11 and the tinned inner heat conduction unit 14 and applies a uniform pressure thus producing a corresponding uniform heat flow through a deformable boundary. Preferably, the deformable boundary is an oily film of synthetic oil, for example, excellent in stability and having a relatively high thermal conductivity.
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