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公开(公告)号:JPH05303993A
公开(公告)日:1993-11-16
申请号:JP27228792
申请日:1992-09-14
Applicant: IBM
Abstract: PURPOSE: To recognize almost the exact time of a reaction in a minimum time and easily and exactly obtain a product of desired quality by watching the increase of temperature versus time of a workpiece in a cavity, and controlling intensity of the radiation. CONSTITUTION: A precuror material of polyamide acid is dissolved in a solvent, and a base is coated with it. This coated part is arranged in a cavity of device 2, microwave is radiated on it from a probe 22. Power is controlled by a controller 54 which responds to a sample temperature measured by a pyrometer 68 and to a cavity temperature monitored by an IR pyrometer 66. A power reflected from the device 2 is measured by an output meter and a sensor 44, 46, and this information is relayed to a controller 54. The controller 54 transmits the programmed response to a motor 50, which moves the probe 22 to the inside or the outside of the cavity. Thus, the reflected power is minimized, and the critical coupling of the system is achieved.
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公开(公告)号:JPH05218654A
公开(公告)日:1993-08-27
申请号:JP23912992
申请日:1992-09-08
Applicant: IBM
Inventor: DEIBITSUDO ANDORIYUU RUISU , JIEEN MAAGARETSUTO SHIYOO
IPC: H05K3/46 , C04B35/638
Abstract: PURPOSE: To completely burn out organic binder resin with almost no oxidation of copper paste metal without decomposing of a ceramic layer by sintering a laminated non-sintered green complex, containing a copper paste metal by microwaves. CONSTITUTION: This composite material containing thermoplastic organic binder, wherein particles selected from a group comprising glass particles and the mixture of the glass particles and crystalline particles are dispersed, is used, and a green sheet, which forms a patterned metallic layer and has the sintering temperature less than the melting point of a conductor, is formed. Then, after a conductor-forming structure pattern is formed on the surface of the green sheet, a second green sheet is overlapped on the surface of this green sheet, so as to hold the pattern. Then, the overlapped and laminated sheets are laminated together, and the laminated body is heated by microwaves to a burn-out temperature. Thus, a binder in the green sheet is decomposed and removed. Thereafter, the laminated body is sintered, and the desired ceramic composite structure is obtained.
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