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公开(公告)号：DE3665742D1
公开(公告)日：1989-10-26
申请号：DE3665742
申请日：1986-10-02
Applicant: IBM
Inventor： DESPAX BERNARD SERGE UNIVERSIT , KAY ERIC
IPC: H01L21/3205 , C23C26/00 , H05K3/10 , H05K3/16
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