公开(公告)号：JP2003098058A

公开(公告)日：2003-04-03

申请号：JP2002246199

申请日：2002-08-27

Applicant: IBM

Inventor： DONG CHEN ,  FLECHA EDWIN ,  JAMES MICHAEL HAMMOND ,  KENNETH GILBERT RAWSLER

IPC: G01B21/30 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/34 ,  G01N13/10

Abstract: PROBLEM TO BE SOLVED: To provide a movement control method for an automatically surface engageable scanning force microscope. SOLUTION: A vibration probe 18 of a scanning force microscope is engaged with a sample surface 24 in an initial approach process. In this process, the probe is moved to the sample surface, until the amplitude of probe vibration in excitation frequency receives effect slightly by the force between a tip and a sample. Next, the change in the vibration amplitude generated by the dithering vibration superposed on excitation vibration is engaged in a final approach process which exceeds a predetermined threshold limit. The excitation frequency is reduced when the phase angle of vibration exceeds other limit, and the amplitude of the excitation vibration increases when amplitude or tip vibration becomes a set value or less. During approach and scanning, vibration amplitude is measured by a demodulator having an intermediate reference signal which is locked in phase by a tip motion signal.

公开(公告)号：JP2000028624A

公开(公告)日：2000-01-28

申请号：JP12150399

申请日：1999-04-28

Applicant: IBM

Inventor： DONG CHEN ,  FLECHA EDWIN ,  JAMES MICHAEL HAMMOND ,  KENNETH GILBERT RAWSLER

IPC: G01B21/30 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/34

Abstract: PROBLEM TO BE SOLVED: To provide a properly automatically surface engageable scanning force microscope. SOLUTION: A vibration probe 18 of a scanning force microscope is engaged with a sample surface 24 in an initial approach process. In this process, the probe is moved to the sample surface, until the amplitude of probe vibration in excitation frequency receives effect slightly by the force between a tip and a sample. Next, the change in the vibration amplitude generated by the dithering vibration superposed on excitation vibration is engaged in a final approach process which exceeds a predetermined threshold limit. The excitation frequency is reduced when the phase angle of vibration exceeds other limit, and the amplitude of the excitation vibration increases when amplitude or tip vibration becomes a set value or less. During approach and scanning, vibration amplitude is measured by a demodulator having an intermediate reference signal which is locked in phase by a tip motion signal.