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Patent Agency Ranking
公开(公告)号：JPH10311841A
公开(公告)日：1998-11-24
申请号：JP10891298
申请日：1998-04-20
Applicant: IBM
Inventor： FLECHA EDWIN , KLOS MARTIN ALLEN , ROESSLER KENNETH G , STOWELL ROBERT MARSHALL
Abstract: PROBLEM TO BE SOLVED: To provide a method for improving the accuracy of measurements made by a scanning probe microscope. SOLUTION: A scanning probe microscope 10 has a probe 18 which moves as it is engaged with and separated from a sample surface by the combination of deflection generated in a high-speed actuator 22 having a relatively small range of motion and deflection generated in a low-speed actuator 26 having a relatively large range of motion. If the deflection of the high speed actuator moves out of a predetermined range, the low speed actuator operates in such a way that the next operation of the high speed actuator brings the high speed actuator back to the predetermined range. If the low speed actuator is required to be operated in this way, scanning movement whereby a sample surface is moved to pass through a probe is stopped until the probe is brought to the correct engagement level with the sample surface, so that the high speed actuator is deflected within the predetermined range.
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公开(公告)号：JPH10332715A
公开(公告)日：1998-12-18
申请号：JP14394698
申请日：1998-05-26
Applicant: IBM
Inventor： DON CHEN , FLECHA EDWIN , HAMMOND JAMES M , KENNETH GILBERT LESLER
Abstract: PROBLEM TO BE SOLVED: To provide a method for determining both of data for describing the magnetic field or electric field extending from the surface of a sample in a single path along the surface by a scanning probe and surface roughness. SOLUTION: A scan probe microscope operates in the same manner as an atomic force microsope operates in the intermission period of scanning motion and scans the surface of a sample so that the scanning lines on the surface passes through a probe tip 14, which vibrates interlocked with the surface. Since the probe tip 14 which is vibrating moves separated from the surface 10 of the sample in the period of the intermission of such scanning motion, the amplitude and phase shift of the probe tip 14 is determined by the gradient of the force field extending outside from the surface of the sample. When the probe tip 14 is attracted by the surface of the sample or near magnetic fields or electric fields or repulsed from it, such force field is established. A system memorizes the data expressing the height of the surface of the sample and force field of each sample point.
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3.发明专利
公开(公告)号：JPH10332713A
公开(公告)日：1998-12-18
申请号：JP14406698
申请日：1998-05-26
Applicant: IBM
Inventor： DON CHEN , FLECHA EDWIN , HAMMOND JAMES M , KENNETH GILBERT LESLER
Abstract: PROBLEM TO BE SOLVED: To provide a piezo-electric actuator with rough segments whose diflection per voltage is relatively large and fine segments whose deflection per voltage is relatively small. SOLUTION: A scanning probe microscope includes a segmental piezo-electric actuator 14 with rough segments 34 and fine segments 36, and its outputs are combined to determine the movement of the remote end of the actuator 14 to which a probe 12 is mechanically connected. The movement of the probe tip 12 or the change in the interlocking level of the probe tip 12 with the surface of a sample is sensed by a laser detector 22, and the detector 22 forms a feedback signal. A compensation signal to move the actuator 14 for holding the interlocking level constant is formed in a comparative circuit 46 for comparing the feedback signal and control signal. This compensation signal is used to drive the fine segments of the actuator 14, and the integration of the compensation signal is used for driving the rough segments 34.
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公开(公告)号：JP2003098058A
公开(公告)日：2003-04-03
申请号：JP2002246199
申请日：2002-08-27
Applicant: IBM
Inventor： DONG CHEN , FLECHA EDWIN , JAMES MICHAEL HAMMOND , KENNETH GILBERT RAWSLER
Abstract: PROBLEM TO BE SOLVED: To provide a movement control method for an automatically surface engageable scanning force microscope. SOLUTION: A vibration probe 18 of a scanning force microscope is engaged with a sample surface 24 in an initial approach process. In this process, the probe is moved to the sample surface, until the amplitude of probe vibration in excitation frequency receives effect slightly by the force between a tip and a sample. Next, the change in the vibration amplitude generated by the dithering vibration superposed on excitation vibration is engaged in a final approach process which exceeds a predetermined threshold limit. The excitation frequency is reduced when the phase angle of vibration exceeds other limit, and the amplitude of the excitation vibration increases when amplitude or tip vibration becomes a set value or less. During approach and scanning, vibration amplitude is measured by a demodulator having an intermediate reference signal which is locked in phase by a tip motion signal.
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公开(公告)号：JP2000028624A
公开(公告)日：2000-01-28
申请号：JP12150399
申请日：1999-04-28
Applicant: IBM
Inventor： DONG CHEN , FLECHA EDWIN , JAMES MICHAEL HAMMOND , KENNETH GILBERT RAWSLER
Abstract: PROBLEM TO BE SOLVED: To provide a properly automatically surface engageable scanning force microscope. SOLUTION: A vibration probe 18 of a scanning force microscope is engaged with a sample surface 24 in an initial approach process. In this process, the probe is moved to the sample surface, until the amplitude of probe vibration in excitation frequency receives effect slightly by the force between a tip and a sample. Next, the change in the vibration amplitude generated by the dithering vibration superposed on excitation vibration is engaged in a final approach process which exceeds a predetermined threshold limit. The excitation frequency is reduced when the phase angle of vibration exceeds other limit, and the amplitude of the excitation vibration increases when amplitude or tip vibration becomes a set value or less. During approach and scanning, vibration amplitude is measured by a demodulator having an intermediate reference signal which is locked in phase by a tip motion signal.
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