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公开(公告)号：CH447393A
公开(公告)日：1967-11-30
申请号：CH733266
申请日：1966-05-20
Applicant: IBM
Inventor： FU FANG FRANK , EDWARD JOHN WALKER , HWA NIEN YU
IPC: H01L27/088 , H01L21/00 , H01L21/22 , H01L21/316 , H01L21/8234 , H01L21/8236 , H01L29/00 , H01L29/78 , H01L11/14
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