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公开(公告)号：JPS63202916A
公开(公告)日：1988-08-22
申请号：JP80288
申请日：1988-01-07
Applicant: IBM
Inventor： ERITSUKU ROI FUOOSAMU , PIITAA DANIERU KAAKUNAA , JIYOOJI DEIBITSUDO PETEITSUTO , ARAN KURAAKU UOORIN , JIERII MATSUKUFUAASUN UTSUDOOR
IPC: H01L21/302 , H01L21/20 , H01L21/263 , H01L21/306 , H01L21/3065
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