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公开(公告)号：DE3372893D1
公开(公告)日：1987-09-10
申请号：DE3372893
申请日：1983-11-24
Applicant: IBM
Inventor： FABRICIUS KAREN ANN , KEMLAGE BERNARD MICHAEL
IPC: H01L21/76 , H01L21/316 , H01L21/32 , H01L21/762
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