Patent search ap:("IBM") AND inv:"FABRICIUS KAREN ANN" Page 1

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发明专利
METHOD OF MANUFACTURING A MINIMUM BIRD'S BEAK RECESSED OXIDE ISOLATION STRUCTURE 未知

公开(公告)号：DE3372893D1

公开(公告)日：1987-09-10

申请号：DE3372893

申请日：1983-11-24

Applicant: IBM

Inventor： FABRICIUS KAREN ANN , KEMLAGE BERNARD MICHAEL

IPC: H01L21/76 , H01L21/316 , H01L21/32 , H01L21/762

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