公开(公告)号：FR2305508A1

公开(公告)日：1976-10-22

申请号：FR7602504

申请日：1976-01-27

Applicant: IBM

Inventor： FEDROWITZ WALTER ,  FRIESER RUDOLF G

IPC: C23C22/60 ,  C23C22/64 ,  C23C22/68 ,  G03F1/00 ,  G03F1/08 ,  C23F7/02 ,  H01L21/31

Abstract: A method for forming an oxidized chromium film on the surface of chromium metal in a controlled manner which involves the use of a permanganate solution. The chromium metal film is first subjected to a basic hydrogen peroxide solution. The chromium surface is then removed from the hydrogen peroxide solution and immersed in an aqueous permanganate solution maintained at a temperature less than about 100 DEG C. for a time preferably within 1 to 5 minutes. At this time the chromium film has been oxidized to the desired thickness depending upon the time and temperature at which the surface has been subjected to the solutions. The surface is removed from the permanganate solution and dried. Should additional thickness of chromium oxide films be desired, the surface is intermittently subjected to the permanganate solution and dried to build up the desired thickness of chromium oxide.

公开(公告)号：DE2558913A1

公开(公告)日：1976-10-07

申请号：DE2558913

申请日：1975-12-29

Applicant: IBM

Inventor： FEDROWITZ WALTER ,  FRIESER RUDOLF GRUENSPAN

IPC: C23C22/60 ,  C23C22/64 ,  C23C22/68 ,  G03F1/00 ,  G03F1/08 ,  C23F7/02

Abstract: A method for forming an oxidized chromium film on the surface of chromium metal in a controlled manner which involves the use of a permanganate solution. The chromium metal film is first subjected to a basic hydrogen peroxide solution. The chromium surface is then removed from the hydrogen peroxide solution and immersed in an aqueous permanganate solution maintained at a temperature less than about 100 DEG C. for a time preferably within 1 to 5 minutes. At this time the chromium film has been oxidized to the desired thickness depending upon the time and temperature at which the surface has been subjected to the solutions. The surface is removed from the permanganate solution and dried. Should additional thickness of chromium oxide films be desired, the surface is intermittently subjected to the permanganate solution and dried to build up the desired thickness of chromium oxide.