公开(公告)号：DE19811347A1

公开(公告)日：1999-09-23

申请号：DE19811347

申请日：1998-03-16

Applicant: IBM

Inventor： DIETZEL ANDREAS H ,  FLEISCHMANN FRIEDRICH G ,  KRAUSE FRANK

IPC: G01Q60/00 ,  G01R33/12 ,  G11B5/82 ,  G11B33/10 ,  G11B5/012

Abstract: The detector consists of a combination of a magnet tester (MAG tester) and a high resolution analyzer. The high resolution analyzer may be an atomic force microscope or a magnetic force microscope. Alternatively, the analyzer may be selected from the group consisting of an optical microscope, profilometer and a micro-Raman apparatus. A method of detecting and classifying defects on the surface of magnetic discs is also claimed.