公开(公告)号：US3672948A

公开(公告)日：1972-06-27

申请号：US3672948D

申请日：1970-01-02

Applicant: IBM

Inventor： FOEHRING ROBERT A ,  GARNACHE RICHARD R ,  KENNEY DONALD M

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/54 ,  C30B25/14 ,  C23C11/00 ,  C23C13/00

CPC classification number: C23C16/45504 ,  C23C16/455 ,  C23C16/45519 ,  C23C16/54 ,  C30B25/14 ,  Y10S148/006 ,  Y10S438/907 ,  Y10S438/935

Abstract: METHOD AND APPARATUS FOR CONTINUOUSLY CARRYING OUT MASS TRANSFER REACTIONS IN A REACTION CHAMBER UTILIZING LAMINAR FLOW TO PROVIDE DIFFUSION LIMITED TRANSPORT AND TO PROVIDE ISOLATION BETWEEN PROCESS STEPS. THERE IS PROVIDED A GASEOUS PHASE MATERIAL INLET FILTER TUBE TO INTRODUCE GASEOUS PHASE MATERIAL IN LAMINAR FLOW WITHIN A REACTION ZONE AND AN EXHAUST PRESSURE BAFFLE TO MAINTAIN LAMINAR FLOW THROUGHOUT THE REACTION ZONE. SUBSTRATES MAY BE CONTINUOUSLY PASSED THROUGH A REACTION ZONE TO PROVIDE AN INLINE SYSTEM.