公开(公告)号：CA990409A

公开(公告)日：1976-06-01

申请号：CA174373

申请日：1973-06-19

Applicant: IBM

Inventor： FROOT HOWARD A ,  SINGH VIJENDRA P

公开(公告)号：CA990408A

公开(公告)日：1976-06-01

申请号：CA173857

申请日：1973-06-12

Applicant: IBM

Inventor： FROOT HOWARD A ,  SINGH VIJENDRA P

公开(公告)号：CA990407A

公开(公告)日：1976-06-01

申请号：CA173856

申请日：1973-06-12

Applicant: IBM

Inventor： FROOT HOWARD A ,  SINGH VIJENDRA P

公开(公告)号：CA1182591A

公开(公告)日：1985-02-12

申请号：CA412955

申请日：1982-10-06

Applicant: IBM

Inventor： FROOT HOWARD A

IPC: C04B35/111 ,  G01N21/64 ,  H01L21/48 ,  H01L21/66 ,  H01L23/15 ,  H05K1/02 ,  H05K1/03 ,  H05K3/12

Abstract: FABRICATION OF SEMICONDUCTOR MODULES WITH CERAMIC SUBSTRATES AND DETECTION OF RESIDUAL GLASS To detect residual glass, such as appears at semiconductor chip pads and via holes during the fabrication of alumina/glass ceramic substrates that are used as supports for the semiconductor devices, the glass used for forming the ceramic substrates is doped with a rare earth oxide. During the manufacturing process, the ceramic structures are irradiated after firing with radiation of wavelengths in the range 350500 nanometers to induce the glass to fluoresce, thereby revealing the residual glass on the surface of the metallic interconnector pads. If residual glass is present, the parts are reworked, or scrapped if necessary.

公开(公告)号：FR2377034A1

公开(公告)日：1978-08-04

申请号：FR7737956

申请日：1977-12-09

Applicant: IBM

Inventor： FROOT HOWARD A

IPC: G01N21/64 ,  H01L21/027 ,  H01L21/66 ,  G01N21/52

Abstract: A rapid, non-destructive system and method for insitu detection and identification of luminescent organic particulates or films on non-luminescent devices, such as semiconductor wafers and chips. The major optical components of the system comprises a luminescent vertical illuminator, an image device and a detector. The method is based on the principle that a very large number of organic materials luminesce when excited by ultraviolet radiation. By scanning the luminescent emission spectra of the known organic materials used in manufacture, a characteristic curve of intensity versus wavelength is obtained and matched to curves of known organic materials, thereby permitting detection and identification of the particulates.