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公开(公告)号：JPS60124824A
公开(公告)日：1985-07-03
申请号：JP14981484
申请日：1984-07-20
Applicant: IBM
Inventor： FUANGUUSHI YORUDAN RAI , RONARUDO NOOMAN SHIYURUTSU
IPC: H01L21/302 , H01L21/3065
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