公开(公告)号：CA924927A

公开(公告)日：1973-04-24

申请号：CA100479

申请日：1970-12-14

Applicant: IBM

Inventor： GARDNER E ,  KEENAN W ,  SCHUMANN P JR

IPC: H01L21/66 ,  G01N21/21 ,  G01N21/55 ,  G01N21/84 ,  G01R31/26

Abstract: 1306850 Optical testing INTERNATIONAL BUSINESS MACHINES CORP 3 Dec 1970 [15 Dec 1969] 57393/70 Heading G2J The impurity concentration of semi-conductive material is determined by measuring the angle of incidence of monochromatic infrared light (polarised in the plane of incidence) at which reflectivity is a minimum. When two such minimums are found, they may be distinguished by a further test (a) intensity of reflected beam or (b) measuring angular spread for a given magnitude of intensity or (c) measuring the intensity of the plane polarized light with the plane of polarization perpendicular to the plane of incidence.