公开(公告)号：DE1589920A1

公开(公告)日：1970-09-17

申请号：DE1589920

申请日：1967-01-17

Applicant: IBM

Inventor： REGH JOSEPH ,  GEORGE KREN JOHN ,  KENROKU SETO DAVID

IPC: C23F1/02 ,  H01L21/00 ,  H01L21/762 ,  H01L5/00

Abstract: 1,137,577. Semi-conductor devices. INTERNATIONAL BUSINESS MACHINES CORP. 29 Nov., 1966 [12 Jan., 1966], No. 53268/66. Heading H1K. In a method of producing electrically isolated islands of monocrystalline semi-conductor material in a wafer by forming grooves, covering with an oxide layer, depositing a support layer of semi - conductor material, and reducing the thickness of the monocrystalline layer, an aperture is formed in the oxide layer before depositing the support layer to provide an electrical connection between the semi-conductor layer, and the thickness of the monocrystalline layer is reduced by electropolishing, which process stops automatically when the oxide layer in the channels is exposed. The grooves are formed in the surface of a wafer of monocrystalline silicon using a silicon dioxide and photo-resist masking and etching technique to surround the areas in which devices are to be formed. The oxide mask is removed and a new layer of oxide is formed over the surface including the grooves. One or more apertures are formed in the oxide layer at positions outside the device areas, and a support layer of polycrystalline silicon is grown on the surface, the support layer contacting the monocrystalline wafer at the apertures to form electrical connections. The monocrystalline layer is reduced in thickness by electropolishing, the current being passed from an electrode applied to the polycrystalline layer to the monocrystalline wafer via the electrical connections at the apertures. The electropolishing is continued until the oxide layer lying in the grooves is exposed. This isolates the device areas from each other and from the remainder of the wafer, thus stopping the electropolishing process. Transistors or diodes can be formed in the device areas by diffusion techniques using oxide masks, and conductive connections can be formed on an oxide layer.