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公开(公告)号：JPS60200964A
公开(公告)日：1985-10-11
申请号：JP24354484
申请日：1984-11-20
Applicant: IBM
Inventor： UIRIAMU UORUTAA BURAUN JIYUNIA , UEIN JIYAKUSON KARII , GERUHARUTO PII DARUKE , FURANSHISU SEODOA RAPURU , POORU ANSONII TOTSUTA
IPC: H01L21/68 , C23C14/50 , H01L21/203 , H01L21/67 , H01L21/677 , H01L21/683
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