公开(公告)号：GB982324A

公开(公告)日：1965-02-03

申请号：GB2536061

申请日：1961-07-13

Applicant: IBM

Inventor： BEHRNDT MARIANNE E ,  GIEDD CARY ROBERT ,  WEED DONALD STRIPPLE ,  PERKINS MERLYN HAROLD

IPC: C23C14/54 ,  G11C11/44 ,  H01B1/00 ,  H01L39/24

Abstract: A superconductor is formed by vapour depositing a film 1000-10.000 Angstroms thick of Sn, Pb, Ta or In on a heated substrate such as glass, mica or a plastic. The substrate is heated to 70-150 DEG C. so that the deposit will agglomerate and become discontinuous at the sloping edges of the layer. In a further embodiment a monatomic layer of Ag, Au or Pt is first vapour deposited on the substrate which is then heated prior to the deposition of the superconducting layer. As shown in Fig. 1, an evacuated vessel 2 at a pressure of 5 X 10-7 to 5 X 10-6 mm/s. Hg. contains a heated substrate 17 and a boat 9 containing the source material to be evaporated through mask 12. A shutter 14 prevents the material being deposited on the substrate until the required temperature is reached. The substrate is maintained at the correct temperature by a tungsten filament and a controller.