公开(公告)号：BR8702319A

公开(公告)日：1988-02-17

申请号：BR8702319

申请日：1987-05-06

Applicant: IBM

Inventor： POHL WOLFGANG DIETER ,  DUERIG URS THEODOR ,  GIMZEWSKI JAMES KAZIMIERS

IPC: G01B7/34 ,  G01B21/30 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B17/34 ,  G11B19/20 ,  G11B21/00 ,  G11B25/04 ,  G11B5/127

Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.