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公开(公告)号：JPH01102302A
公开(公告)日：1989-04-20
申请号：JP22765088
申请日：1988-09-13
Applicant: IBM , LEITZ ERNST GMBH
Inventor： DUERIG URS THEODOR , FISCHER ULRICH CHRISTIAN , POHL WOLFGANG DIETER
IPC: G01B11/00 , G01B11/30 , G01Q10/00 , G01Q20/02 , G01Q60/18 , G01Q60/22 , G11B5/60 , G11B9/00 , G11B11/00 , G11B11/105 , G11B21/20
Abstract: PURPOSE: To improve sensitivity when changing distance to an optical energy and further an electrical quantity by coating a sensor with a continuous thin film in a condition so that a detection small piece is coated. CONSTITUTION: A sensor body is formed as a light waveguide of a laser beam 2 and has a light entrance side 3, an exit side 4 for light to be guided through a body 1, and a light exit side 10 for light to be diffracted within the body 1. A detection small piece 15 is arranged on a surface 5 of the body 1 between the entrance side 3 and the exit side 4 and operates as an antenna and is coated with a continuous thin film 16. Then, a surface 17 of a body M to be measured is measured by a measurement side 18, the gap of distance prescribed in reference to a reference side 14 is converted to the quantity of optical energy, and the quantity is converted to an electrical quantity by a detector means 11. Since the small piece 15 is coated with the thin metal film 16, incidence light can be properly separated from scattered light, thus improving antenna effect.
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公开(公告)号：DE3772573D1
公开(公告)日：1991-10-02
申请号：DE3772573
申请日：1987-09-25
Applicant: IBM , LEICA INDUSTRIEVERWALTUNG
Inventor： DUERIG URS THEODOR , FISCHER ULRICH CHRISTIAN , POHL WOLFGANG DIETER
IPC: G01B11/00 , G01B11/30 , G01Q10/00 , G01Q20/02 , G01Q60/18 , G01Q60/22 , G11B5/60 , G11B9/00 , G11B11/00 , G11B11/105 , G11B21/20 , G02B21/00 , G11B7/09
Abstract: The surface scanning sensor comprises an optical sensor body (1), rectangular in cross section, which is transparent to laser light (2) and is formed as a waveguide for that light. An upper surface boundary (6) and a lower surface boundary (5) are parallel to each other. A light exit (10) is provided for light diffracted within the sensor, located in the middle of the upper surface (6). A photo detector (11) converts the light so diffracted, into an electrical signal. Opposite the light exit (10) is positioned a reference (14) where a 'detection particle' (15) is located. It is formed as a sphere with a diameter which is less than half the wavelength of the laser light source, though other circular or conical shapes may be used. The detection particle constitutes an antenna and is manufactured from a dielectric material which is coated with a thin layer of metal (16) along with an area of the sensor body. A measurement body whose surface (17) is to be measured at a site (18) opposite the sensor antenna is positioned within the wavelength of the laser light. The sensor produces an electrical output from its photodetector whichis proportional to the distance between the target surface and the antenna. When combined with a movement control system the sensor may be used to accurately map surface deformations of the target.
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公开(公告)号：AU585449B2
公开(公告)日：1989-06-15
申请号：AU7325787
申请日：1987-05-21
Applicant: IBM
Inventor： POHL WOLFGANG DIETER , DUERIG URS THEODOR , GIMZEWSKI JAMES KAZIMIERZ
IPC: G01B7/34 , G01B21/30 , G01Q20/04 , G01Q80/00 , G11B9/00 , G11B9/08 , G11B9/14 , G11B17/34 , G11B19/20 , G11B21/00 , G11B25/04 , H01J37/20 , H01J37/28 , H01J37/285
Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.
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公开(公告)号：DE3679319D1
公开(公告)日：1991-06-20
申请号：DE3679319
申请日：1986-05-27
Applicant: IBM
Inventor： POHL WOLFGANG DIETER , DUERIG URS THEODOR , GIMZEWSKI JAMES KAZIMIERZ
IPC: G01B7/34 , G01B21/30 , G01Q20/04 , G01Q80/00 , G11B9/00 , G11B9/08 , G11B9/14 , G11B17/34 , G11B19/20 , G11B21/00 , G11B25/04
Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.
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公开(公告)号：AU7325787A
公开(公告)日：1987-12-03
申请号：AU7325787
申请日：1987-05-21
Applicant: IBM
Inventor： POHL WOLFGANG DIETER , DUERIG URS THEODOR , GIMZEWSKI JAMES KAZIMIERZ
IPC: G01B7/34 , G01B21/30 , G01Q20/04 , G01Q80/00 , G11B9/00 , G11B9/08 , G11B9/14 , G11B17/34 , G11B19/20 , G11B21/00 , G11B25/04
Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.
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Patent Agency Ranking
公开(公告)号：MX168548B
公开(公告)日：1993-05-31
申请号：MX621087
申请日：1987-04-24
Applicant: IBM
Inventor： POHL WOLFGANG DIETER , DUERIG URS THEODOR , GIMZEWSKI JAMES KAZIMIERZ
IPC: G01B7/34 , G01B21/30 , G01Q20/04 , G01Q80/00 , G11B9/00 , G11B9/08 , G11B9/14 , G11B17/34 , G11B19/20 , G11B21/00 , G11B25/04
Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.
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公开(公告)号：AT66737T
公开(公告)日：1991-09-15
申请号：AT87114008
申请日：1987-09-25
Applicant: IBM , LEICA INDUSTRIEVERWALTUNG
Inventor： DUERIG URS THEODOR , FISCHER ULRICH CHRISTIAN , POHL WOLFGANG DIETER
IPC: G01B11/00 , G01B11/30 , G01Q10/00 , G01Q20/02 , G01Q60/18 , G01Q60/22 , G11B5/60 , G11B9/00 , G11B11/00 , G11B11/105 , G11B21/20 , G02B21/00 , G11B7/09
Abstract: A sensor body (1) is formed as a light waveguide for laser light (2). A light exit site (10) for light diffracted within the sensor body (1) is located at a surface (6) thereof which faces away from a measured body (M). A detection particle (15) is located at the surface (5) of the sensor body (1) facing the measured body (M). It has a substantially convex and rounded off form and a major dimension which is smaller than the wavelength of the light (2). The measured body (M) is located in the optical near field of the detection particle (15). The latter has a major dimension of 5 to 500 nm and preferably of 20 to 100 nm. A detector means (11) converts the optical energy of the diffracted light to an electrical detector signal. A continuous thin film (16) is provided as a coating for the sensor (S). It substantially covers the detection particle (15) and at least part of the surface (5) of the sensor body (1) in the vicinity of the detection particle (15) It has a thickness which is smaller than one half of said predetermined wavelength. Preferably it is formed of gold and has a thickness of less than 100 nm. The sensor is used to finally convert a distance to an electrical quantity.
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公开(公告)号：AU599706B2
公开(公告)日：1990-07-26
申请号：AU7921187
申请日：1987-09-30
Applicant: IBM
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公开(公告)号：BR8704432A
公开(公告)日：1988-05-24
申请号：BR8704432
申请日：1987-08-27
Applicant: IBM
Inventor： DUERIG URS THEODOR , GIMZEWSKI JAMES K , GRESCHNER JOHANN , POHL WOLFGANG D , WOLTER OLAF
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公开(公告)号：BR8702319A
公开(公告)日：1988-02-17
申请号：BR8702319
申请日：1987-05-06
Applicant: IBM
Inventor： POHL WOLFGANG DIETER , DUERIG URS THEODOR , GIMZEWSKI JAMES KAZIMIERS
IPC: G01B7/34 , G01B21/30 , G01Q20/04 , G01Q80/00 , G11B9/00 , G11B9/08 , G11B9/14 , G11B17/34 , G11B19/20 , G11B21/00 , G11B25/04 , G11B5/127
Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.
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