PROCESS FOR MEASURING THICKNESS OF VERY THIN MOVING FILMS

    公开(公告)号:CA1127864A

    公开(公告)日:1982-07-20

    申请号:CA348151

    申请日:1980-03-21

    Applicant: IBM

    Abstract: PROCESS FOR MEASURING THICKNESS OF VERY THIN MOVING FILMS The thickness of very thin dielectric films covering metal surfaces are measured while the surface and the film are in motion. This is accomplished by spacing a prism very close to the moving film, passing light which is polarized in the plane of incidence into said prism at various angles of incidence to generate surface plasma oscillations on the film-metal layer interface and thereby attenuating reflectivity, then measuring said reflectivity as a function of the angle of incidence, determining that angle of incidence which produces the minimum reflectivity and comparing that angle of incidence to a previously determined standard to measure the film thickness. SA978069

    PROJECTION DISPLAY DEVICE
    2.
    发明专利

    公开(公告)号:CA1147837A

    公开(公告)日:1983-06-07

    申请号:CA349763

    申请日:1980-04-14

    Applicant: IBM

    Abstract: PROJECTION DISPLAY DEVICE A projection display device is provided in which variation in the index of refraction is used to modulate attenuated total reflection. The device comprises a thin film of material having a negative dielectric constant and having one side in optical contact with the base of a prism. The second side of the film is in contact with a medium of variable refractive index. A beam of light which is plane polarized in the plane of incidence is passed onto the base of the prism at an angle to excite a surface electromagnetic wave at the interface between the medium and the film, while the refractive index of the medium is varied so as to modulate the beam. SA978075

    AMPLITUDE MODULATION OF LIGHT BEAM

    公开(公告)号:CA1081836A

    公开(公告)日:1980-07-15

    申请号:CA315396

    申请日:1978-10-31

    Applicant: IBM

    Abstract: AMPLITUDE MODULATION OF LIGHT BEAM An optical modulator suitable for use with a collimated light beam having a moderate cross section and a fast response time and operational at relatively low voltage includes, for example, a glass prism and a smooth metal surface that are separated by an adjustable gap. The gap is filled with a medium, for example, air, having an index of refraction lower than the prism. A beam of monochromatic light is passed into the prism at a specific angle of incidence to undergo total internal reflection at the glass prism-gap interface. A change of approximately 1 micron in the thickness of the gap is sufficient to change the reflectivity from greater than 95% to essentially zero. The size of the gap is mechanically adjusted and this mechanical device determines the frequency response of the light modulation.

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