公开(公告)号：CA1127864A

公开(公告)日：1982-07-20

申请号：CA348151

申请日：1980-03-21

Applicant: IBM

Inventor： GORDON JOSEPH G II ,  PHILPOTT MICHAEL R ,  SWALEN JEROME D

IPC: G01B11/06 ,  G01N21/55 ,  G01B11/04

Abstract: PROCESS FOR MEASURING THICKNESS OF VERY THIN MOVING FILMS The thickness of very thin dielectric films covering metal surfaces are measured while the surface and the film are in motion. This is accomplished by spacing a prism very close to the moving film, passing light which is polarized in the plane of incidence into said prism at various angles of incidence to generate surface plasma oscillations on the film-metal layer interface and thereby attenuating reflectivity, then measuring said reflectivity as a function of the angle of incidence, determining that angle of incidence which produces the minimum reflectivity and comparing that angle of incidence to a previously determined standard to measure the film thickness. SA978069

公开(公告)号：CA1100091A

公开(公告)日：1981-04-28

申请号：CA313482

申请日：1978-10-16

Applicant: IBM

Inventor： CZORNYJ GEORGE ,  SWALEN JEROME D ,  WU ANTHONY W

IPC: B05D7/14 ,  B05D1/18 ,  B05D1/20 ,  B05D5/08 ,  B05D7/24 ,  C07C57/52 ,  C08J7/10

Abstract: PREPARATION OF POLYMER MONOMOLECULAR FILMS of the Invention A substrate surface is lubricated or passivated by applying thereto a monomolecular layer of a compound having the formula (CF3 - (CF2)n - (CH2)m - X - COO ?2 M or (CF3 - (CF2)n - (CH2)m - X - (CH2)L - COO ?2 M wherein n is 6 to 20, each of m and L is 6 to 10, X is -CH=CH-or -C?C-, and M is a divalent cation, and polymerizing said layer in situ.