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公开(公告)号：DE3851077D1
公开(公告)日：1994-09-22
申请号：DE3851077
申请日：1988-02-19
Applicant: IBM
Inventor： GOTWALD CHARLES ALLEN , OKTAY SEVGIN , SHARMA AJAY , SONNAD VIJAY , ZINGHER ARTHUR RICHARD
IPC: H01L23/467 , H01L23/473
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公开(公告)号：DE3851077T2
公开(公告)日：1995-03-30
申请号：DE3851077
申请日：1988-02-19
Applicant: IBM
Inventor： GOTWALD CHARLES ALLEN , OKTAY SEVGIN , SHARMA AJAY , SONNAD VIJAY , ZINGHER ARTHUR RICHARD
IPC: H01L23/467 , H01L23/473
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