公开(公告)号：DE3170635D1

公开(公告)日：1985-06-27

申请号：DE3170635

申请日：1981-10-27

Applicant: IBM

Inventor： HAYES LAWRENCE PATRICK

IPC: B25J15/06 ,  B25B11/00 ,  B65H3/08 ,  B23Q3/08

Abstract: This is a vacuum clamp for holding workpieces which assures that the workpiece is held without distortion. This is accomplished by providing a fixed support, with a convex surface, and a flexible seal around the fixed support so that when a vacuum is drawn within the seal the workpiece being held abuts the fixed support tangentially. The convex surface of the support does not force the workpiece to conform to the surface of the support as it would if the surface of the support were flat.

公开(公告)号：DE3473356D1

公开(公告)日：1988-09-15

申请号：DE3473356

申请日：1984-05-14

Applicant: IBM

Inventor： HAYES LAWRENCE PATRICK ,  JAIN KANTILAL ,  KERTH RANDALL THOMAS

IPC: G03C7/20 ,  B23K26/073 ,  G02B17/00 ,  G02B19/00 ,  G02B27/00 ,  G02B27/09 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G02B13/08

Abstract: Apparatus for producing a line source of a desired shape from a light source (10) such as an excimer laser comprising means (12,14,16) for directing the light source along a predetermined path to a cylindrical lens (18) positioned to produce a vitural line image S' having uniform intensity along its length at a first location. However, the image is intercepted by a cylindrical mirror(20) inclined at an angle so that the beam is transformed into a curved shape and directed onto a quartz diffuser (22). This apparatus produces a curved self-luminous distribution having uniform intensity over its length. In a specific embodiment, the diffuser is a directional diffuser.